有机玻璃表面透明导电薄膜制备方法研究
Study on Preparation of transparentconductive thin film on the Plexiglas’s surface
WANG Bao-song
(Jinling machine factory ofJiangsu province, Nanjing 211100, CHN
)
Abstract:
The structure,preparation and properties of transparent conductive film on the Plexiglas
’
s surface have beenstudied. The samples of coating on Plexiglas were prepared using magnetronsputtering method and the optimum parameters, through the metal oxidefilm-based composite designing. By coating sample characteristics, and theresults showed that: deposition time of 60s, the optimum thickness 5nm is goldfilm deposition parameters; the test piece sheet resistance of coating is 8Ω/□, the average transmissionof visible light is 70%, and expressed the good conductivity, optical andenvironmental adaptation comprehensive performance index.
Key words:
transparentconductive thin film; Sheet resistance; transmission
有机玻璃在屏幕保护、发光显示、控制面板和遮光导光板等光学电子器件方面具有广泛的应用。为满足不同的光电特性要求，往往需要在有机玻璃表面镀制不同功能的膜层，而透明导电薄膜是其中重要的一类。透明导电薄膜是把光学透明特性与导电性能复合在一起的光电材料，该类膜层既有高导电性，又在可见光范围内有很高的透光性，且在红外光范围有很高的反射性，在光电产业中有着广阔的应用前景
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